Technical University Ilmenau

Operation name
2018 FGI 0014
Operation summary
Laser direct exposure system: Laser lithography system for direct exposure of photoresists
Operation start date
01.01.2019
Operation end date
30.06.2021
Total eligible expenditure allocated to the operation
469.331,29
Union co-financing rate
80 %
Operation postcode
98693
Country
Deutschland
Name of category of intervention
058 - Research and innovation infrastructure (public)