SIOS Meßtechnik GmbH (Metrology)

Operation name
2018 FE 9018
Operation summary
Integration of a system for rapid scanning probe lithography in a nanopositioning and measuring machine
Operation start date
01.11.2018
Operation end date
31.10.2021
Total eligible expenditure allocated to the operation
460.220,49
Union co-financing rate
80 %
Operation postcode
98693
Country
Deutschland
Name of category of intervention
062 - Technology transfer and cooperation between universities and companies, especially for the benefit of SMEs